摘要
研究了一种新型的绝对长度测量光栅,讨论了其利用条形码结构确定绝对位置以及利用增量式痕道进行细分的工作原理,分析了利用平行于测量方向的刻线进行动态误差修正的方法。
The paper studies a new type of grating to measure absolute length. The principles of determining absolute position with bar code structures and interplating with incremental structures are systematically discussed, and the dynamic error correction method using the grating line which is parallel to the measuring direction is analysed, and a mathematical model to correct error is put forward.
出处
《合肥工业大学学报(自然科学版)》
CAS
CSCD
1996年第4期69-73,共5页
Journal of Hefei University of Technology:Natural Science
基金
机械工业部教育司科技基金
关键词
光栅
长度测量
误差修正
绝对式
grating, absolute length measurement, error correction