摘要
在含有ZnSO4、SC(NH2)2、NH4OH的水溶液中采用CBD法沉积ZnS薄膜,研究了沉积时间、水浴温度、搅拌等工艺条件对沉积薄膜的影响。薄膜的厚度与搅拌的强度有很大关系,表明扩散传质是薄膜生长的控制步骤。XRF和XRD测试表明沉积的薄膜中含有ZnS和Zn(OH)2,SEM测试表明薄膜颗粒大小相近,但不致密。随着沉积时间的增加,薄膜厚度增加,透过率减小。当前采用CBD-ZnS薄膜制备的无镉CIGS太阳电池转换效率达到8.54%。
Chemical-bath deposition of ZnS thin films from NH4OH/SC（NH2 ）2/ZnSO4 solutions was studied. The effect of process parameters （such as deposition time, bath temperature and stiring rate） on the growth was presented. The structural optical, chemical and electrical properties of the ZnS thin films deposited by this method were studied. Stiring rate effects seriousy on the thickness of ZnS thin film, therefore, the grown rate of ZnS was controlled by liquid phase mass transfer. The XRD analysis of as-deposited films shows that the films are cubic ZnS structure. The XRD analysis of annealed films shows the films are cubic ZnS and ZnO mixture structure. Scanning electron microscopy studies of the ZnS thin films deposited by this method show that the films are continuous and homogeneous.
出处
《太阳能学报》
EI
CAS
CSCD
北大核心
2007年第2期155-159,共5页
Acta Energiae Solaris Sinica
基金
国家863高新技术发展计划(2004AA513021)
南开大学基金(P02011)
安徽省高等学校青年教师科研资助项目(2006jq1151)
