摘要
本文对电磁聚焦移象系统中静电聚焦场的逆设计进行了研究,利用多电极系统静电场的电位迭加原理,建立了数学模型,用最优化方法对系统的静电聚焦场进行了设计计算。
An inverse design of electrostatic focusing field for electrostatic and magnetic imaging is investigated. Using the potential superimposition theorem of electrosta:ic field in multi-electrode system, a mathematical model has been developed and an optimization method has been introduced into computation for designing the electrostatic focusing field of the imaging system.
关键词
电磁聚焦
移象
静电聚焦场
逆设计
Photoelectric imaging
Electron optics
Electrostatic and magnetic combined focusing
Inverse design of electron optical system
Cathode lenses
