摘要
本文研究了宽束大物面电磁聚焦系统弯曲轴电子光学象差理论。我们引进了旋转的曲线正交坐标系,导出了主轨迹方程、一级近似的弯曲轴近轴轨迹方程,讨论了理想成象性质。本文定义了象差积分函数,导出了形式简洁的全部二级象差函数。
Electron optical aberration theory for angularly wide and transversely large electron beams in electromagnetic focusing systems with curvilinear axes has been further developed. By introducing a rotating curvilinear orthogonal coordinate system, the curved main trajectory equation, the first order curvilinaer paraxial trajectory equation and the first order ideal imaging properties have been discussed. By defining integration function, all second-order aberration coefficients have been expressed in compact form.
出处
《电子学报》
EI
CAS
CSCD
北大核心
1992年第3期1-8,共8页
Acta Electronica Sinica
基金
国家自然科学基金
关键词
电子光学
电子透镜
象差
电磁聚焦
Electron optics, Electron lenses, Aberration of electron optical systems, Focusing of charged particles
