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基于AFM的压痕硬度自动检测算法的研究

Research of Indentation Hardness Auto Calculating Methods Based on AFM
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摘要 由纳米硬度计可测得载荷-压深曲线,并由原子力显微镜可以扫描得到压痕图。在对单晶硅压痕硬度的检测试验中,用Matlab软件对获得的数据进行处理,编制了利用压痕边长法、直接面积法、Oliver-Pharr法和压痕功法等计算压痕硬度方法的程序,可以自动计算压痕的面积和体积并计算得到单晶硅的硬度值。 Load-depth curves can be obtained by nanoindenter, and the indentation images can be obtained by atomic force microscopy. The indentation hardness experiments were completed on single crystal silicon. Programming some calculation indentation hardness methods such as using indentation length method, direct area method, Oliver-Pharr method and work of indentation method that can auto calculate indentation area and hardness by Matlab soft.
作者 周亮 赵修华
机构地区 哈尔滨工业大学机电学院 济南钢铁集团总公司
出处 《机械工程师》 2007年第1期44-46,共3页 Mechanical Engineer
关键词 原子力显微镜 压痕硬度 单晶硅 atomic force microscopy indentation hardness single crystal silicon
分类号 TB938.2 [机械工程—测试计量技术及仪器]
  • 相关文献

参考文献8

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机械工程师
2007年 第1期

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