摘要
本文叙述用化学汽相沉积法制备微波电子管灯丝用氧化铝涂层及这种灯丝在各种运用场合下的试验性能。按照热化学反应的一般理论并结合实验条件,对工艺规范的选择进行了讨论。最后,详细分析了影响沉积质量的因素。
This paper describes the theory of making aluminum oxide isolated layer for microwave electron tubes by chemical vaporphase deposition and the properties of the heater in different case of the applications. According to the general theorem of thermo-chemical reaction and experi ment conditions, the selection of process norm is discussed. Finally, the factors effecting the deposition quality are stated in detail.
出处
《电子科技大学学报》
EI
CAS
CSCD
北大核心
1989年第2期282-287,共6页
Journal of University of Electronic Science and Technology of China
关键词
微波管
汽相沉积
灯丝
热辐射
vapor-phase deposition
heat radiation
optical pyromeser
