摘要
提出了一种利用静电力制动扭转梁带动微镜旋转,从而实现二维开关功能的MEMS光开关.使用ANSYS和COVENTOR软件对器件结构进行了模态、静态和瞬态分析,并对微镜制动梳齿的位置、器件的尺寸和扭转梁结构进行了优化.通过在微镜下方设计大空腔实现微镜90°的大角度扭转,使用新型衬底梳齿和结合扭转梁设计实现高静电制动效率,将制动电压降至18V.引入背面梳齿提高开关响应速度,模拟结果表明,光开关具有毫秒量级响应时间.与其他设计相比,该设计的微镜具有扭转角度大、制动效率高且开关速度较快的优点.
A 2D electrostatic micromirror for optical switch matrix was presented in this paper. The torsion beam is made of single crystal silicon to improve its performance. Two kinds of designs were proposed and compared with each other, modal, static and transient analyses of device structures are carried out with ANSYS and COVENTOR soft ware, and the position of the comb, dimensions of the device and the structure of torsion beam were optimized respectively. Torsional angle as many as 90° can be realized in the back chamber. By introducing a novel substrate combs on the backside, drive voltage can be reduced to 18 V with a fast switching time of several milliseconds in the simulation, which is among the best in the present reports.
出处
《纳米技术与精密工程》
EI
CAS
CSCD
2006年第4期326-330,共5页
Nanotechnology and Precision Engineering
关键词
MEMS光开关
扭转梁
微镜
制动电压
开关时间
MEMS optical switch
torsion beam
micro mirror
drive voltage
switching time
