摘要
研究了磁控溅射法制备的Cr-Si-Ni电阻薄膜在不同模拟环境介质溶液中的电学稳定性及腐蚀行为。结果表明,500℃热处理后纳米晶结构的Cr-Si-Ni电阻薄膜在25℃的模拟海洋、工业、酸性及碱性环境介质溶液中浸泡240h后,薄膜试样的相对电阻变化值(ΔR/R)分别为0.27%、0.08%、0.96%、3.31%。说明薄膜在上述4种环境中电学稳定性和耐腐蚀性能从高到低依次为:工业环境、海洋环境、酸性环境、碱性环境。薄膜在4种溶液中都能发生自钝化现象而在膜层表面形成SiO2保护层,形成的钝化膜在模拟的工业环境中最稳定。
Electrical properties stability and corrosion behavior of Cr-Si-Ni resistive films deposited by magnetron sputtering were investigated in different environments solutions. The results revealed that the relative resistance change （△R/R） of the nanocrystalline Cr-Si-Ni films by annealing at 500℃ in simulated marine, industrial, acidic, and alkaline environments at 25℃ for 240h were 0.27% ,0.08% ,0.96% ,3.31% ,respectively. It indicated that the electrical properties stability and corrosion resistance of the films decreased as industrial, marine ,acidic and alkaline environments in sequence. The films presented a spontaneous trend to passivation, and formed a SiO2 protective layer in all of the corrosion solutions. Furthermore, the passive film in industrial environment exhibited the best protective effects on the films than in other environments.
出处
《功能材料》
EI
CAS
CSCD
北大核心
2006年第12期1891-1894,共4页
Journal of Functional Materials
基金
云南省省院省校科技合作计划资助项目(2005YX11)
关键词
电阻薄膜
模拟环境
电学稳定性
腐蚀行为
resistive films
environments
electrical properties stability
corrosion behavior
