摘要
MEMS技术制造的传感器具有体积小、重量轻、成本低等特点。用于测量大气气压的传感器,主要材料是硅、氮化硅和铂金,氮化硅薄膜形成了传感器的主要结构。这种压力传感器与一般传感器相比具有结构简单、工艺易于实现以及精度高等优点。设计了工艺过程,制作了器件样片,并算法补偿了温度对传感器的影响。
The sensor based on MEMS has advantages of light weight, small size and low cost. A new structure pressure sensor has been designed and fabricated. The main materials of the sensor are Si, Si3N4 and Pt and Si2N4 membrane forms the main structure. The sensor has advantages of simple structure, easy processing and high accuracy compared to the normal sensor. The temperature compensation is also given, which improves the accuracy of the sensor.
出处
《电子器件》
EI
CAS
2006年第3期726-729,共4页
Chinese Journal of Electron Devices
基金
国家自然科学基金课题资助(90207006)
中国科学院微系统创新项目资助
