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CVD金刚石膜X射线探测器的研制及性能研究 被引量:4

Study on preparation and properties of X-ray detector based on CVD diamond film
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摘要 金刚石以其独特的性能成为辐射探测器的理想材料。采用HFCVD方法制备了高质量、(100)取向的CVD金刚石膜,在此基础上研制出X射线探测器。使用55Fe 5.9keV X射线研究了CVD金刚石膜探测器的光电流和电荷收集效率。结果表明,探测器在偏压加到100V还具有好的欧姆接触;电场为50kV.cm-1时的暗电流与光电流分别为16.3和16.8nA;电荷收集效率η为45.1%,对应的电荷收集距离δ(CCD)为9.0μm。 The inherent properties of diamond make it an ideal material for radiation detectors. In this work, (100)-textured CVD diamond film with better quality was obtained by using a hot filament chemical vapor deposition (HFC/rD) technique to fabricate as X-ray detectors. 5.9 keV X-rays were used to investigate the photocurrent and charge collection efficiency of the detector. For the CVD diamond detector, the electrical contact is a fine ohmic for bias voltage up to 100 V, and the darkcurrent of -16.3 nA and the photocurrent of -16.8 nA are obtained at an electrical field of 50 kV(cm^-1. The average charge collection efficiency of -45. 1% corresponding to the charge collection distance (CCD) value of 9.0 (m is achieved.
出处 《核电子学与探测技术》 CAS CSCD 北大核心 2006年第5期669-672,共4页 Nuclear Electronics & Detection Technology
基金 国家自然科学基金(60277024) 上海市纳米专项(0452nm051) 上海应用材料研究与发展资助 上海市重点学科(T0101)资助
关键词 CVD金刚石膜 X射线探测器 光电流 电荷收集效率 CVD diamond film X-ray detector photocurrent charge collection efficiency
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参考文献8

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同被引文献27

  • 1周海洋,朱晓东,詹如娟.CVD金刚石在辐射探测领域中的应用[J].核技术,2005,28(2):135-140. 被引量:8
  • 2马洪良,刘忠礼,郑志坚,唐道源.金刚石(Ⅱa)光导X射线探测器[J].强激光与粒子束,1994,6(3):407-410. 被引量:7
  • 3孙可煦,江少恩,易荣清,崔延莉,丁永坤,刘慎业.X射线二极管时间特性研究[J].物理学报,2006,55(1):68-75. 被引量:12
  • 4欧阳晓平,王兰,范如玉,张忠兵,王伟,吕反修,唐伟忠,陈广超.金刚石膜探测器研制[J].物理学报,2006,55(5):2170-2174. 被引量:14
  • 5王林军,刘健敏,苏青峰,史伟民,夏义本.金刚石膜α粒子探测器的电学性能研究[J].物理学报,2006,55(5):2518-2522. 被引量:5
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