摘要
提出了一种有效的分析二元光学元件衍射效率的新方法逐层分析法，并对四台阶二元器件，就蚀刻深度误差和横向对准误差对器件衍射效率的影响进行了详细的分析和讨论。
A new method named Layer by Layer Analysis Method was presented to analyze the diffraction efficiency of binary optical elements. To four step binary optical elements, the effects of fabrication errors, such as depth and alignment errors, on the diffraction efficiency were investigated in detail. It was shown that this method is very convenient and effective to the analysis of diffraction efficiency of binary optical elements with alignment errors.
出处
《光学学报》
EI
CAS
CSCD
北大核心
1996年第10期1350-1355,共6页
Acta Optica Sinica
基金
国家自然科学基金
关键词
衍射光学元件
二元光学
衍射效率
光学器件
diffractive optical element (DOE), binary optics, diffraction efficiency.
