摘要
利用共沉淀法制备了ZnSnO3粉体,通过直流溅射制备了气敏薄膜。研究了老化温度、薄膜的组成对气体的灵敏度影响。实验结果表明:600℃老化后,气敏膜薄膜的主要成分是ZnSnO3,在450℃时,该薄膜对乙醇灵敏度约为650,有望开发成酒敏元件。
ZnSnO3 powder is prepared by co-precipitation, and gas sensing thin film is fabricated via direct current sputtering. The influences of the annealing temperatures and the composition of the thin films on the sensitivity of gas are investigated. The experimental results show that the main composition of the thin film annealed at 600℃ is ZnSnO3, the sensitivity of the thin film for ethanol measured at 450℃ is 650, ZnSnO3 is a hopeful candidate material for ethanol sensor.
出处
《传感器与微系统》
CSCD
北大核心
2006年第7期70-72,共3页
Transducer and Microsystem Technologies
关键词
薄膜
直流溅射
电导
气敏特性
thin film
DC-sputtering
conductivity
gas-sensing properties
