摘要
说明了冷冻卡盘的工作原理，论述了冷冻卡盘的使用特点及使用中的有关问题。
The principle by which a freeze chuck works is depicted. The features and the problems related to using the freeze chuck are also discussed. In addition, some applied examples in machine shop are cites in this paper.
出处
《机械科学与技术》
CSCD
北大核心
1996年第5期769-772,共4页
Mechanical Science and Technology for Aerospace Engineering
关键词
冷冻
卡盘
半导体致冷
加工
Freeze chuck Semiconductor refrigeration Machining
