摘要
本文介绍带可调水平磁场的高精度高温熔体粘度测量仪在半导体熔体粘度测试中的应用。该仪器试验用料少、测试温度范围宽、磁场均匀可调、精度高。利用回转振动法对硅、锗等半导体熔体的粘度进行测试分析,获得许多有意义的结果。
A precise melt viscometer with adjustable horizon magnetic field is introduced in semiconductor melt. The viscometer have many virtues, such as little material used in experiment, wide range of measuring temperature, uniform and adjustable magnetic field and high precision. Many useful results can be obtained in the investigation on viscosity of Si , Ge melt by rotary oscillating.
出处
《现代仪器》
2006年第3期34-35,30,共3页
Modern Instruments
基金
教育部科学研究重点项目(205017)
国家自然科学基金(50372016)
河北省自然科学基金项目
关键词
粘度仪
硅
锗
半导体熔体
粘度
Viscometer Si Ge Semiconductor melt Viscosity