摘要
采用压痕试验法在超显微硬度仪上对不同基体材料上类金刚石碳膜的结合性能进行了评估，并对类金刚石碳膜的本征硬度进行了测量。结果表明，临界载荷Ｐｃｒ、抗裂性指标ｄＰ／ｄＸ是评估膜基结合性能的两个有用参数，可用来评定膜基结合性能。硅基体上类金则石碳膜的硬度达２７ＧＰａ，硬质合金基体上类金刚石破膜的硬度达２０ＧＰａ。
Adhesive properties between diamond-like carbon films and various substrates have been assessed using micro-indentation test method by means of super micro-hardness tester (Micro Duromat4000). The Intrinsic hardness values of diamond-like carbon films have also been measured simultaneously. The results have shown that the approximate load (Pcr) for crack initiation around indentation and the slope (dP/dX) obtained from the indentation load vs crack length function are two useful adhesion parameters to evaluate adhesive properties. The intrinsic hardness values of diamonnd-like carbon films on silicon and cemented carbide are about 27GPa and 20GPa respectively.
出处
《机械工程材料》
CAS
CSCD
1996年第3期1-3,共3页
Materials For Mechanical Engineering
