摘要
本文报道一种双肖特基势垒叉指电极型快速光探测器，其光敏面１５０×１５０μｍ２，指长１４０μｍ，指定１０μｍ，指间隔１０μｍ．实验结果表明：该探测器的光灵敏度为０．７０Ａ／Ｗ，暗电流为ｎＡ量级（ＵＤＣ＝１０Ｖ），其响应时间小于４０ｐＳ．
In this paper we report a kind of double shoffky-bander interdigital electrode GaAs metalsemi condctor-mefal (MSM)Photodetector with response time less tan 40PS, Sensitivity 0. 3A/W, dark current nA order (Van = 10V). Its digital lengt is 140μm, wide 10μm, interral 10μm and its photosensitive region is 150×150μm2.
出处
《南开大学学报（自然科学版）》
CAS
CSCD
1996年第1期42-45,54,共5页
Acta Scientiarum Naturalium Universitatis Nankaiensis
