摘要
采用脉冲多弧离子镀技术制备TiN/AlN纳米多层膜,随着调制周期的减小,稳定态六方AlN相逐渐转变成亚稳态立方AlN相,形成以TiN/AlN超晶格结构为主的超硬薄膜。与标准图谱的对比可知,TiN/AlN超晶格是AlN在模板立方TiN材料的影响下,在TiN层上以亚稳态相立方结构外延生长所形成。试验表明TiN/AlN薄膜具有良好的耐腐蚀性能以及使用寿命。
The impulse multi-arc ion plating technique is used to prepare TiN/AIN nano-multilayers. The steady Wurtzite AIN phase is changed to unsteady NaCl-type crystal structure gradually with reducing film period. The main phase structure of the multilayer is TiN/AIN superlattice with higher hardness. The TiN/AIN superlattice was formed when NaCl-type AIN epitaxialgrowth on TiN film surface and influenced by the prototype material. TiN/AIN multilayer also has excellent corrosion resistance and operating life.
出处
《工具技术》
北大核心
2006年第5期16-19,共4页
Tool Engineering
基金
湖北省教育厅基金资助项目(项目编号:2002A01008)
