摘要
采用多弧离子镀制备了具有不同色彩的Cr/Cr2O3薄膜,利用紫外-可见光分光光度计研究了薄膜在可见和红外波段的光谱特性,利用SEM进行薄膜表面结构和形貌的分析,利用四探针测阻仪测试了样品的方块电阻,利用红外发射率测量仪测试了样品的红外发射率。结果表明:Cr/Cr2O3薄膜具有丰富的色彩,在可见光区有明显的反射峰,可见光区光谱特性主要受膜厚的影响,方块电阻随膜厚增加而有变大,样品的红外发射率主要取决于金属层,平均红外发射率最小降至0.371。
The colorful Cr/Cr2O3 thin films were prepared by Multi-arc ion deposition technique. The visible and infrared optical spectral properties were observed by use of UV-visible spectrophotometer. The surface morphology and structure were studied by scanning electron microscopy （SEM）. The square resistance was analyzed by four-probe resistance measuring apparatus. The samples＇ infrared emissivity was measured by the infrared emissivity measuring instruments. The results show that： Cr/Cr2O3thin films possess abundant color;obvious reflection peaks are observed in visible wave band;the visible optical spectral properties of the samples are affected mainly by the thickness of the films ;the samples＇ square resistances change with the thickness variety of thin films, samples＇ infrared emissivity mainly depends on metal layer, the minimum average infrared emissivity is 0.371.
出处
《宇航材料工艺》
CAS
CSCD
北大核心
2008年第5期37-40,共4页
Aerospace Materials & Technology
关键词
多弧离子镀
光谱特性
氧化铬
红外发射率
Multi-Are ion deposition, Spectrum properties, Cr2O3, Infrared emissivity
