摘要
在白宝石,ZrO_2,SrTiO_3单晶基片上,用射频磁控反应溅射工艺淀积 YBaCuO 超导薄膜。用SEM,TEM 方法研究了超导薄膜的形貌和显微结构。讨论了它们与超导性质的关系。指出了几种不同类型的晶界。
The morphology and microstructure of YBaCuO superconducting thinfilms deposited on sapphire,ZrO_2 and SrTiO_3 single crystal by RF magnetron reactivesputtering were studied by SEM and TEM.The relationship between the microstructureand the superconductivity was discussed.Several different kinds of grain boundaries werealso pointed out.
关键词
超导薄膜
显微结构
YBACUO
superconducting thin films
microstructure
grain boundary
morphology
