摘要
氧化锌半导体材料以其优良的光电性能在光电子、传感器、透明导体等领域得到广泛应用。综述了氧化锌半导体功能材料在敏感材料、压电材料、导电薄膜等方面的性能、应用及薄膜的制备技术,相对于三维块体材料,氧化锌薄膜可以适应大规模集成电路的需要,更具发展前途和研究价值。氧化锌薄膜的性质随掺杂组分和制备条件的不同而表现出很大的差异性。
Znic oxide has a wide range of technological applications as semiconductive material including photoelectron, sense organ, tansparent conductor and others. This paper concentrates on the properties and applications of ZnO in sensitive materials, piezoelectric materials and conductive film, also on techniques which the thin film was prepared by. Contrasting with monolith materials, the ZnO thin film can meet the demands of molectron and possesses a great development future and research value. The ZnO thin film can be doped with a variety of ions and prepared with many techniques to exhibit different properties.
出处
《无机盐工业》
CAS
北大核心
2006年第5期11-13,共3页
Inorganic Chemicals Industry
关键词
氧化锌
半导体材料
薄膜
光电性能
ZnO
semiconductive material
thin film
optical and electrical property
