摘要
介绍了MOEMS加速度地震检波器中敏感元件-简谐振子的工作和设计原理,并详细讨论了影响简谐振子腐蚀质量的因素,在试验中对各向异性腐蚀工艺进行了研究和改进,制作出了高质量的简谐振子。成功用于国家自然科学基金项目“光电集成加速度地震检波技术理论与试验研究”的集成光学器件试验中。
The principle of operation and the design of the harmonic oscillator is introduced, the factors influencing the anisotropic etching quality of the harmonic oscillator are analyzed. In experiment, the fabrication technology was studied and improved, by which the high quality harmonic oscillator has been successfully fabricated. It has been applied in the integrated optical chip of ＂the theory and experiment research of photoelectric integrated acceleration seismic geophone technology ＂-a program supported by the National Nature Science Foundation of China.
出处
《传感技术学报》
EI
CAS
CSCD
北大核心
2006年第2期301-304,共4页
Chinese Journal of Sensors and Actuators
基金
国家自然科学基金'光电集成加速度地震检波技术理论与试验研究'项目资助(40274047)
