期刊文献+

采用MEMS技术高选择性、电子调谐式低温滤波器 被引量:1

Highly-Selective Electronically-Tunable Cryogenic Filters Using Monolithic, Discretely-Svitchable MEMS Capacitor Arrays
在线阅读 下载PDF
导出
摘要 描述了一种使用HTS/AuMEMS 开关电容器阵的低插损电子调谐式滤波器。同步将每个谐振器的电容值以相同变化量变化,两极滤波器就得到调谐。单极谐振器在3500~5000之间的K 系数得到了证明。在77K 平均Q 值为7000 时的总调谐范围大约为25%。 A low loss electronically tunable filter was demonstrated using HTS/Au MEMS switched capacitor arrays.The two-pole filter was tuned by simultaneously varying the capacitance of each resonator by equal amounts.A K factor of between3,500and 5,000 was demonstrated for single pole resonators. The total tuning range was about 25% with an average Q of 7,000 at 77 K.
出处 《电子工业专用设备》 2006年第4期45-50,共6页 Equipment for Electronic Products Manufacturing
关键词 低温电子 滤波器 微电机器件 可调谐电路和器件 Cryogenic electronics, Filters, Microelectro-mechanical devives, Circuits and devices
  • 相关文献

参考文献7

  • 1A.K.Chinthakindi,D.bhusari,B.p.Dusch,J.Musolf,B.A.Willemsen,E.M.Prophet,M.Roberson,and P.A.Kohl,Elec trostatic actuators with intrinsic stressgradients[J].J.Elec trochemical Soc.,vol.149,no.8,pp.H139-H145,2002.
  • 2Y.S.Hijazi,D.Hanna,D.Fairweather,Y.A.Vlasov,and G.L.Lark ins Jr.Fabrication of a superconducting MEMS shunt svitch for RF applications[J].IEEETrans.Appl.Supercond.,vol.13.no.2,Jun.2003.
  • 3J.Muldavin and G.M.Rebeiz.All-metal high-isolation seri es and series/shunt MEMS svitches[J].IEEE Microw.Com pon.Lett.,pp.59-71,Dec.2001.
  • 4N.Hivuj,M.A.Michalicek,Y.C.Kee,K.C.Gupta,and V.M.Bright.Digitally Controllable High-Q MEMS Capacitor for RF Applications[C].NSF Center for Advanced Manufacturing and packaging of Microwave,Optical and Digital Electronics,Dept.of Mechanical Engineering,Univ.Colorabo,Boulder,CO.MTT-SO1.
  • 5D.Scheck.CYCLOTENE(BCB)resins for wafer bumping and waferlevel packaging[C].in WLP Seminar,Hsin chu,Taiv an,Sep.14,2001.
  • 6H.Nieminen,V.Ermolov,K.Nybergh,S.Silanto,and T.Ryhan en.Microelectromechanical capacitors for RF applications[J].J.Micromech.Microeng.,vol.12,pp.177-186,2002.
  • 7R.Maboudian,W.R.Ashurst,andC.Carraro.Self-ass mbled Mon olayers as Anti-Stiction Coatings for MEMS:Characteristivs and Recent Developmerts[C].Dept.Of Chemical Engineering Univ.CaliforniaBerkeley.

同被引文献8

引证文献1

二级引证文献2

相关作者

内容加载中请稍等...

相关机构

内容加载中请稍等...

相关主题

内容加载中请稍等...

浏览历史

内容加载中请稍等...
;
使用帮助 返回顶部