摘要
闭合场非平衡磁控溅射离子镀技术制膜时镀层设计不受元素化合价及相图的限制,工艺控制简单,可以方便地设计镀层的成分和结构,且膜/基结合性能突出。研究了用该技术制备的硬质CrTiAlN梯度膜,该膜具有良好的结合力和韧性,在无润滑切削条件下,适用不同的切削方式:对于普通高速钢钻头提高寿命数十倍,同时扩展工件材料至高强度钢;对断续式的铣削黄铜,可提高寿命25倍;对于加工PVC板的微钻,寿命仍可提高4倍以上。
The closed filed unbalanced magnetron sputter iron plating technique is an advanced PVD technique which is characterized by flexible coating design and simple deposition process control,i, e. coating design is not limited by element valence and phase diagram,so the components and structure of coating can be conveniently designed. And the adhesion between coating and substrate is favorable. CrTiAIN hard gradient coating deposited by this technique is studied. This coating has excellent cutting performance in different service conditions without lubrication due to the well adhesion and toughness. During the continues drilling process, the life of coated common HSS drill can be increased by several ten times so much,and at the same time,even the cut material is high strength steel;for interrupted milling brass, the service life can be increased by 25 times;and the life of microdrill for machining PCB boards can be increased by over 4 times.
出处
《西安理工大学学报》
CAS
2006年第1期20-23,共4页
Journal of Xi'an University of Technology
基金
国家"863"科技攻关项目(2005AA33H010)
陕西省教育厅专项科研基金项目(05JK274)
关键词
闭合场非平衡磁控溅射
刀具
镀层设计
结合强度
closed field unbalanced magnetron sputtering
cutting tools
coating design
adhesion
