摘要
介绍了日本HAMAMASTU公司改进表面分流型二维光电位置传感器的工作原理及专用信号处理电路,指出其仍存在位置检测误差比较大的显著缺点。作者沿传感器高度和水平Y两个方向在Ф5mm内对该传感器线性度进行了大量实验研究,实验结果表明,该传感器的线性度性能A区要明显好于B区,应用时如能控制在A区,将具有较高的测量精度,其非线性度误差可达到≤1%。
This paper introduced the principle and signal processing circuit of tetra-lateral 2-dimensional Position Sensitive Detector hy HAMASTU Co. of Japan and pointed out its the remarkable defect of large position deter error. The author made a lot of experiments on the PSD linearity along its Y direction of height and level within Ф5mm. The experiments show that the linear property in area A is obviously better than in area B.If the application of the PSD can be controlled in aero A, a higher test precision will be achieved and the linearity can be reduced to less than 1 %.
出处
《中国测试技术》
2006年第2期142-144,共3页
CHINA MEASUREMENT & TESTING TECHNOLOGY
关键词
位置传感器
线性度实验
非线性度误差
Position sensitive detector
Linearity experiment
Linearity error
