摘要
在宽带膜厚监控系统中,对光谱光强的实时准确测量是系统控制成败的关键.根据系统结构,分析了影响系统光谱分辨率的因素,选取合适的光栅、CCD.实验表明:增加狭缝宽度虽然提高了信号强度,但降低了系统分辨率.根据控制要求,确定狭缝宽度为1.4mm.采用汞灯的特征谱线对CCD像元与光谱波长的对应关系进行标定,实验结果表明满足对膜系光谱特性的要求.
An accurate real-time measurement of spectrum intensity is critical to wideband monitoring system of thin-film thickness. Based on the analysis of influence factors to spectram resolution suitable grating and CCD are selecfed in accordance with the system structure. It is proved by experiments that signal intensity increases, but systen, resolution dcreases if the slit wideness is increased. To meet the system reguirements,slit wideness of 1.4 mm is determined. The corresponding calibration of CCD image-unit and spectrum wavelength is realizod by the typical spectrum lime of standard light source.
出处
《西安工业学院学报》
2006年第1期25-28,共4页
Journal of Xi'an Institute of Technology
基金
"十五"预备第一批兵器支撑基金项目(YJ0267051)
关键词
膜厚控制
光谱光强
光谱分辨率
标定
thin-film thickness monitoring
spectrum intensity
spectrum resolution
calibration
