摘要
介绍多晶硅压力传感器，由于采用二氧化硅介质膜作应变电阻之间的隔离，因而提高了传感器的工作温度。实验表明，该类传感器具有灵敏度高、精度高、温度特性好、工作温限高等特点。
A poly-crystalline silicon pressure sensor is described. The temperature charactetistics of the sensor is improves because of using the isoation between the piezoresis tors with SiO2 dielectric. The experimental results have shown that the poly-crystalline silicon pressure sensor has high sensitivity, high accuracy, excellent temperature characteristics and high operation temperature.
出处
《测控技术》
CSCD
北大核心
1996年第2期16-17,共2页
Measurement & Control Technology
关键词
压阻效应
多晶硅
压力传感器
传感器
piezoresistive effect, poly-crystalline silicon,pressure sensor
