摘要
气体传感器日渐发展,其应用的范围越来越广,特别是在环境质量检测和工业生产过程安全检测、保障人民的生命安全等方面越加广泛。简要介绍了各种气体传感器的工作原理,并对常见几种有毒性气体(一氧化碳、二氧化碳、二氧化硫及氮化物)和可燃性气体(氢气、甲烷)的各种类型传感器的研究进展和工作机理以及敏感材料进行了介绍,同时对MEMS工艺制作气体传感器进行了展望。
With the development of the gas sensor, more and more applications are implemented, especially in testing the environment quality and the industry＇s safety production, even people＇s life. The gas sensors＇ working principles including the new development of several normal poisonous gases and flammable gases will be introduced. A novel production technics--MEMS which is applied to fabricate the gas sensor will also be mentioned.
出处
《传感器世界》
2006年第1期6-11,共6页
Sensor World
