摘要
通过对3种小周期金属多层膜进行低角度X射线衍射分析,采用几种方法计算其单周期厚度及多层膜总厚度,还采用表面轮廓仪及原子力显微镜来评价多层膜的总厚度。通过比较这几种方法的测量结果,提出利用第一布喇格衍射主峰之后的衍射次级小峰来进行小周期多层膜厚度评价是简易可行的。
Three kinds of short period metallic multilayers were evaluated by small angle X-ray diffraction（XRD） method. The single period thickness and the total thickness of multilayers were calculated with various methods. The total thickness was further evaluated by using Dektak 6M surface profilers and atomic force microscope. The results obtained by those methods indicated that it is possible to evaluate the thickness of the short period multilayers through using the small peaks of second order diffraction which were after the first Bragg diffraction principal peak.
出处
《分析测试学报》
CAS
CSCD
北大核心
2006年第1期1-5,共5页
Journal of Instrumental Analysis
基金
上海市科委纳米专项基金资助项目(0359nm006-10352nm011)
关键词
多层膜
厚度测量
XRD
Multilayers
Thickness measurement
XRD
