摘要
以化学气相沉积法制备TiC涂层的反应为实例,建立了TiC涂层反应的标准吉布斯自由能变化的计算模型,应用所开发的计算和绘图程序,精确地计算和绘制了TiC涂层反应的标准吉布斯自由能变化与温度关系图形。
Based on the example of CVD （chemical vapor deposition） TiC coating reaction, calculation is made and plotting model is established for standard Gibbs free energy change. Accurate calculation and plotting of the standard free energy change for CVD TiC coating reaction are realized based on the developed calculation and plotting programs.
出处
《稀有金属与硬质合金》
CAS
CSCD
2005年第4期60-62,共3页
Rare Metals and Cemented Carbides
关键词
TIC涂层
标准吉布斯自由能
计算及绘图
TiC coating
standard Gibbs free energy change
calculation and plotting
