摘要
报道了液氮温度下Ｈｅ＋离子注入ＬｉＮｂＯ３波导的制备，采用棱镜耦合法测量了波导退火前后各导模的有效折射率，计算了波导层折射率的分布和晶体中Ｈｅ＋离子的射程分布和损伤分布，两者吻合得较好。
Fabrication of LiNbO 3 crystal waveguides implanted by He + ions is reported in this paper. The effective refractive index of the guided modes were measured before and after annealing. The refractive index profiles were calculated and proved to be in agreement with the damage profile and range profile.
出处
《光学学报》
EI
CAS
CSCD
北大核心
1996年第8期1215-1216,共2页
Acta Optica Sinica
关键词
铌酸锂
波导
折射率分布
氦离子注入
He + implantation, LiNbO 3 waveguide, refractive index profile, range profile.
