摘要
研制出一种超精加工表面粗糙度的激光测量仪，采用光外差测量原理和共光路干涉仪结构，具有很强的抗外界振动干扰能力．仪器结构简单，测量灵敏度高，纵向分辨率达０．４ｎｍ，横向分辨率达１．７２μｍ。
A laser surveying apparatus of super grinding surface roughness was developed. It is based on the optical heterodyne measurement and common-path interferometer. It has a good ability to resist the disturbance from vibration outside the apparatus. It has simple constructure and high measuring sensitivity. The longitudinal resolution is 0. 4nm and lateral resolution is 1.72 μm.
出处
《应用激光》
CSCD
北大核心
1996年第2期60-62,共3页
Applied Laser
关键词
表面粗糙度
光外差
激光测量仪
surface roughness
optical heterodyne
measurement
