摘要
提出了根据测量得到的待测薄膜的透射率数据,采用全局优化算法—自适应模拟退火算法结合共轭梯度算法求解薄膜的光学特性参数。并对T a2O5单层薄膜的厚度及折射率进行测量计算。实验结果表明,计算得到的光学特性参数值与实测结果相一致,厚度误差小于3nm,在540nm处折射率误差小于0.02。该方法具有操作简单、无损测量、计算速度快、精度高等优点,具有相当的实用性。
This paper introduces a new method to determine the optical parameters of thin films using adaptive simulated annealing （ASA） algorithm and conjugate gradient （CG）algorithm. Based on the theory of thin film calculating, it uses the transmission tata through thin film over a range of wavelengths to calculate the optical parameters of thin film. The thickness and refractive index of a single layer Ta2O5 film is measured as an example. The experimental results show the calculated transmittance of the film is consistent with the measured value. The thickness error between different measurements is less than 3nm and the refractive index error at 540nm is less than 0. 02. This method has the advantage of easy to operate ,without hurt to the sample ,with fast speed and high precision.
出处
《光学仪器》
2005年第4期73-77,共5页
Optical Instruments
基金
国家自然科学基金资助项目(60177013)
关键词
全局优化
自适应模拟退火算法
共轭梯度算法
薄膜测量
global optimization
adaptive simulated annealing （ASA）
conjugate gradient （CG）
thin film measurement
