摘要
报道了用脉冲激光淀积（ＰＬＤ）方法在磷酸氧钛钾（ＫＴＰ）晶体（１００）面上生长沿［１１０］取向的铌酸钡钠（ＢＮＮ）光波导薄膜。Ｘ射线衍射，扫描电子显微镜，Ｘ射线光电子能借测量表明生长的ＢＮＮ膜是外延单晶膜。膜表面粗糙度很小。光波导模式和光损耗测量表明膜具有较低的损耗。
This paper reports that the barium sodium niobate (BNN) optical-waveguide film with orientation [110] has been epitaxially grown on the (100) plane of substrate KTiOPO4(KTP) by pulsed laser deposition (PLD). The measurements of XRD, SEM and XPS show that the as- grown BNN film is epitaxial single crystal with smooth surface. The measurements of optical-waveguide mode and propagation loss indicate that the film is of good optical waveguide properties with low loss.
出处
《中国激光》
EI
CAS
CSCD
北大核心
1995年第6期461-464,共4页
Chinese Journal of Lasers
关键词
光波导
脉冲激光淀积
铌酸钡钠
薄膜
optical-waveguide, pulsed laser deposition, barium sodium niobate, potassium titanyl phosphate
