摘要
提出了准分子激光器阳极预电离方案，并在实验上证实了阳极预能有效地改善放电均匀性，同时使激光输出能量略有提高。
The preionization near anode was suggestted in stead of preionization near cathode and experiments show that preionization near anode has improved both discharge homogenity and pulse energy output.
出处
《中国激光》
EI
CAS
CSCD
北大核心
1995年第3期199-201,共3页
Chinese Journal of Lasers
关键词
准分子激光器
预电离
放电
均匀性
excimer laser, preionization, homgenity of discharge
