摘要
近期来,由于科学技术的发展,混合微波集成电路几乎进入所有实用的微波装备。本文对其结构、工艺、材料以及在微波系统中的应用作了介绍。
Recent years have seen the development of techniquesleading to hybrid microwave integrated circuits (HMIC). Which are nowapplied practically in all kinds of microwave equipments. HMIC fabricationtechnologies, materials and system application are discussed in this paper.
出处
《上海航天》
1995年第5期37-43,共7页
Aerospace Shanghai
关键词
微波技术
微波电路
集成电路
Microwave technique, Microware circuit, Hybrid microwave integrated circuit, Application