摘要
由于ＹＢａＣｕＯ是一种怕水、酸和乙醇等有机溶剂的材料，且通过一次光刻工艺后ＴｃＯ要下降３～４Ｋ．因此，减少光刻工艺次数就成为制备多元器件的关键。本文介绍一种适用于多元超导红外探测器的新工艺，在电极剥离几乎无法成功的情况下，用电极掩膜板的方法可获得性能优良的微形图样，使成品率达１００％。
Since YBaCuO film is corroded easily by water, acid or alcohol, its transition temperature falls 3￣4K after each photograph process. In order to avoid this harmful effects on the performance of the superconductive detector, a mask was designed and used, the electrodes were lated formed with it. The yield has been greatly improved and reaches almost 100%.
出处
《红外技术》
EI
CSCD
1995年第2期14-16,共3页
Infrared Technology
关键词
超导红外探测器
电极掩膜板
红外探测器
Superconductive multielement IR detector Electrode mask Photograph
