摘要
本文回顾了铁电薄膜材料及当前的几种主要制备技术。介绍了这种薄膜材料在非挥发性存储器、表面波器件、显微定位及驱动器等方面的应用。特别指出了在军用飞机、导弹、卫星等飞行器上装载的计算系统，若应用铁电非挥发性存储器将显著提高计算系统的性能。
he materials and several major depeition metheds of ferroelectric thin films have been re-viewed. Some possible applications of ferroelectric thin films such as non-volatile memories,surface acousticwave (SAW) devices,micropositioning and actuation devices are mentioned. It is emphasized that ferroelec-tric non-volatile memories applied in the on-hard computing systems of aircraft、nussiles and Satellite wlllsigliificantly increase these systems capabilities.
出处
《材料工程》
EI
CAS
CSCD
北大核心
1995年第3期12-15,共4页
Journal of Materials Engineering
关键词
铁电薄膜
薄膜器件
制备
机载设备
铁电体
ferreelectric thln film,thin film device,processing,on-hard devices
