摘要
重点介绍了采用阴极溅射法制取的铂-铂铑10薄膜热电偶的最新高温应用,包括制造工艺、高温绝缘以及试验和应用结果。同时还讨了论目前正在研制过程中的薄膜透明热电偶和耐蚀薄膜热电偶的有关问题。
The most successful high temperature thin film thermocouples are sputter deposited from platinum and platinum 10% rhodium targets. This paper reviews the fabrication techniques used to form the thermocouples,approaches used to solve the high temperature insulation and adherent problems .applications and test results. In addition,discussion is presented on the recent research on thin film transparent thermocouples and corrosion resistant thin film thermocouples.
出处
《材料导报》
EI
CAS
CSCD
1995年第5期28-32,共5页
Materials Reports
关键词
薄膜热电偶
阴极溅射
薄膜
透明热电偶
thin film thermocouples,sputter,thin film transparent thermocouples,corrosion resistant thin film thermocouples
