摘要
本文主要叙述采用RF反应离子镀、RF反应溅射、MOCVD和激光辅助蒸发等方法制备高度取向的ZnO薄膜。文章还介绍了ZnO薄膜在热电红外传感器、集成化学反应传感器、紫外光探测器,集成加速度计传感器和湿度传感器等方面的应用。
This article mainly describes the preparation of ZnO thin films with highly orientation using RF reactive ion plating, RF reactive sputtering, MOCVD, and laser-assist evaporation, etc. Furthermore, The application to some sensors included pyroelectric IR sensor, integrated chemical reaction sensor, ultraviolet detector, integrated accelerometer sensor and humility sensor are also presented.
出处
《压电与声光》
CSCD
北大核心
1989年第1期25-35,共11页
Piezoelectrics & Acoustooptics
