摘要
极值法是目前国内外真空镀膜膜厚监控中应用最广泛的方法。本文阐述了此法的膜厚监控原理、系统、方法。重点讨论了为提高监控精度而采取的一些改进措施。
In China or other countries,the extremun method is widely applied to monitor the thickness of vacuum deposition optical film.The principle,system and method of extermun method for monitoring optical film thickness are expounded.Some improvement measures adopted to uplift monitoring precision have been discussed emphatically.
出处
《半导体光电》
CAS
CSCD
北大核心
1989年第2期74-78,共5页
Semiconductor Optoelectronics
关键词
光学薄膜
膜厚监控
极值法
Optical Film
Film Thickness Monitoring
