摘要
荷能离子轰击固体表面在往使表面产生特定的结构，因而改变溅射总产额和微分产额。这些变化是由于表面结构改变而引起的几种效应，例如弹离子入射角、形貌对发射粒子的屏蔽以及合金表面元素按微区局域富集等的影响而产生的，本文发展了一种考虑上述诸效应的理论方法，并详细讨论该方法在元素（Ｃｄ）和合金（Ａｌ＿ｘｓｎ＿（１００－ｘ））靶实验微分产额方面的应用。
Solid surfaces subjected to energetic ion bombardment generally develop chara- cteristic structures,which may significantly change total and differential sputteringyields. The change is due to several competing effects,for instance,change of theeffective projectile incidence angle,recapture of obliquely ejected particles(shadoweffect),and element local-enrichment in different micro-region on the alloy surface. From these,we have now developed an efficient new theoretical method for coveringall of the above effect. exactly.This method and its application to the analysis ofexperimental results of element(Cd)and alloy system(Al_x-Sn_(100-x))targets are de- scribed in detail.
出处
《物理学报》
SCIE
EI
CAS
CSCD
北大核心
1994年第1期161-168,T002,共9页
Acta Physica Sinica
基金
国家自然科学基金
