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ZnO薄膜的塞贝克效应 被引量:1

Seebeck effect of ZnO thin films
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摘要 采用直流反应磁控溅射方法在玻璃基底上成功地沉积了C轴取向性能良好的ZnO薄膜。本文研究了C轴取向性良好的ZnO薄膜在光学方面的一些性质以及ZnO薄膜的塞贝克效应,并从理论上进行了分析。 Zinc oxide thin films which are well C-axis-orientated have successfully been deposited on glass substrates using DC reactive magnetron sputtering. The optical properties of ZnO thin films are studied, with Seebeck effect of ZnO thin films (investigated) and analyzed theorically.
出处 《真空》 CAS 北大核心 2005年第3期20-22,共3页 Vacuum
关键词 ZNO薄膜 光学性质 塞贝克效应 zinc oxide film optical properties Seebeck effect
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