摘要
研制了不同SiO2 掺杂量 (0 %～ 10 % ,wt% )的WO3 纳米颗粒薄膜NO2 传感器。先由钨酸钠制得白钨酸 ,经加热分解白钨酸得WO3 粉体 ,并对粉体进一步超声细化 ;再用溶胶 -凝胶法制得SiO2 粉体 ,然后采用固相反应法进行掺杂。用XRD检测掺杂粉体的结构特征 ,并计算得出粉体颗粒平均粒径为 6 2nm。在Al2 O3 陶瓷管金电极上组装敏感膜 ,制作简单。制得的Taguchi型NO2 传感器的线性响应范围为 (5～ 30 )× 10 -6,响应 -回复快 ,稳定性和重现性好。
Thin film NO_2 sensors were fabricated from SiO_2-doping WO_3 nanoparticles with various SiO_2 contents (0%～10%, wt%). The WO_3 powder was obtained by the means of thermal pyrolysis of white tungstic acid starting from Na_2WO_3 then followed with ultrasonic treatment, and the SiO_2 powder was synthesized via the route of sol-gel. The SiO_2-WO_3 nanosize composites were prepared from solid-phase reactions and characterized by XRD. The average grain size of the composites was 62 nm. The sensitive films were structured on the Al_2O_3 substrate with Au electrode. This Taguchi-type sensor shows a linear response to NO_2 in the concentration range of 5×10\+\{-6\} to 30×10\+\{-6\}. It exhi-bits some advantages, such as simplicity of preparation, rapidity of measurement, and satisfactory stability and reproducibility.
出处
《传感技术学报》
CAS
CSCD
北大核心
2005年第1期28-31,共4页
Chinese Journal of Sensors and Actuators
关键词
纳米颗粒
气体传感器
白钨酸
三氧化钨
二氧化氮
nanoparticles
gas sensors
white tungstic acid
tungsten trioxide
nitrogen dioxide
