摘要
论述了用CVD和PVD方法制备硬涂层的若干进展，包括MT-CVD，PACVD，HVS及IBAD等，并介绍了超硬涂层发展的简况。
Some developments of hard-coatings produced by CVD and PVD methods aredescribed. The above mentioned developments include MT-CVD, PACVD, HVS, IBAD and etc.Furthermore, the developments of super-hard coatings are also briefly presented.
出处
《上海金属》
CAS
1994年第2期55-62,共8页
Shanghai Metals
