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用普通镀膜机制备的 YBaCuO 超导膜

YBaCuO SUPERCONDUCTING FILMS FABRICATED USING ORDINARY DEPOSITION STATION
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摘要 在较常用的镀膜机上分三个周期分层蒸镀 Y_2O_3、Ba、Cu 薄膜,热处理后得到零电阻温度 T(?)=80K 的 YBaCuO 薄膜。膜的质量对热处理最高温度非常敏感,镀膜过程是否充氧并不重要,得到的退火膜以 c 轴织构为主。 Using an ordinary deposition station,Y2O3 ,Ba and Cu films were successively deposited and the process was repeated twice. After annealing,YBaCuO superconducting films were obtained with zero resistance at T = 80K.The quality of films was very sensitive to the highest temperature of the heat-treatment .Whether oxygen was introduced during deposition was not important. Texture with c-axis of grains perpendicular to the substrates predominated our annealed films.
机构地区 南京大学物理系
出处 《低温与超导》 CAS CSCD 北大核心 1989年第1期40-43,共4页 Cryogenics and Superconductivity
基金 高 T_c 超导材料攻关项目
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