摘要
以Ｓｉ３Ｎ４粉末和添加了Ａｌ２Ｏ３的热压Ｓｉ３Ｎ４陶瓷材料作为研究对象，分别研究了Ｓｉ３Ｎ４材料在空气气氛中和在Ｎ２气气氛中（其中氧分压Ｐｏ２＝１～１０Ｐａ）的氧化反应方式。利用化学分析、ｘ射线衍射分析和ｘ光电子能谱分析，对Ｓｉ３Ｎ４材料的氧化产物进行了测定，同时对Ｓｉ３Ｎ４材料的氧化反应方式进行了热力学分析。结果表明，在高温下的空气中氧化时，氧化反应方式为钝化氧化，而在高温下的Ｎ２气气氛中氧化时，虽然有少部分的钝化氧化存在，但氧化反应方式主要是活化氧化。
In this study,the oxidation modes in air or in nitrogen atmosphere(with oxygen partialpressure Po2=1～10Pa)of both Si3N4 powders and hot-pressed Si3N4 ceramics with Al2O3 as additivewere investigated.The oxldation products were determined using Chemical analysis,XRD and x-rayelectron spectrum analysis.Thermodynamic analysis was used to determine the oxidation mode ofSi3N4 materials. The results show that passive oxidation occurs at high temperature in air, while activeoxidation is the dominant mode in nitrogen atmosphere at high temperature,although some passive oxidation exists.
关键词
氮化硅
钝化
活化
氧化
陶瓷
silicon-nitride
passive oxidation
active oxidation.
