摘要
本文报道了一种制备大面积超导薄膜的激光扫描淀积方法。这种方法是通过一光学变换传输系统使激光束能绕一定的半径旋转,旋转的激光束去扫描消融超导靶材来淀积大面积超导薄膜。实验表明用这种激光扫描淀积方法可使超导薄膜的均匀区域扩大10倍左右。
In this paper, a laser scanning deposition method for large area superconducting films is presented. Using a optical transmission system to make the laser beam to scan on the superconducting target with different radii rotation and to ablate it for depositing large area superconducting films. The results show that film thickness uniform areas enlarge about 10 times using this method.
出处
《中国激光》
EI
CAS
CSCD
北大核心
1993年第11期853-856,共4页
Chinese Journal of Lasers
基金
国家自然科学基金资助项目
关键词
激光扫描
超导薄膜
淀积法
制备
laser scanning, large area superconducting films
