摘要
本文对微米量级微间隙的电击穿性能进行了研究,在制作出微间隙试样的基础上,改变微间隙所处环境气氛以及间隙距离,测试了不同条件下的击穿电压V相对于气体压强P关系曲线,系统研究了N_2、O_2、Ar、He、Ne等环境气氛以及间隙距离对微间隙击穿性能的影响。对微间隙的静电击穿机制也进行了一些有益的探讨。
Several kinds of micro-gap specimens are prepared to simulate the gas discharge properties of micro-gap between stator and rotor of static electrical micromotor. The discharge voltages of various micro-gap of different distances and ambiences (N_2, O_2, Ar, He, Ne gases) are studied with changing the gas presure, It is found out that the gap ambiences and distances have a great effect on the gas discharge voltages. The mechanism of gas discharge in micro-gap are proposed as well.
出处
《真空电子技术》
北大核心
1993年第2期1-5,共5页
Vacuum Electronics
基金
国家自然科学基金
关键词
微间隙
电击穿性能
集成电路
硅
制造工艺
micro-gap gas discharge property mechanism of gas discharge
