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倾斜衬底上沉积的钙钛矿结构氧化物薄膜的电阻各向异性 被引量:1

The Anisotropy of Resistance of Proveskite Multimetal Oxide Film Deposited on Titled Substrates
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摘要 用脉冲激光沉积法(PLD)分别在平的和倾角为10°、15°、20°的LaAlO3倾斜衬底上制备了La0 5Sr0 5CoO3薄膜和La0 67Ca0 33MnO3薄膜。用四探针法测量薄膜表面的电阻,发现平衬底上生长的薄膜没有电阻各向异性,而倾斜衬底上生长的薄膜存在电阻各向异性现象,并且倾角越大,电阻各向异性越明显。这是由于倾斜衬底上薄膜的自组织结构造成的。 La_(0.5) Sr_(0.5) CoO_3 and La_(0.67) Ca_(0.33)MnO_3 films have been prepared by pulsed laser deposition(PLD),on flat and titled LaAlO_3 substrates with 10°,15°and 20° angles respectively and the resistances are measured with fourprobe methods.Experiments show no resistance anisotropy for the thin films on even substrates while the resistance anisotropy is discorored on film grown on titled substrates.The film on substrate with larger tilting angle has more clear resistance anisotropy.It is proposed that selforganized structure the thin film grown on titled substrates is the cause of resistance anisotropy.
出处 《云南冶金》 2004年第3期42-45,共4页 Yunnan Metallurgy
关键词 脉冲激光沉积法(PLD) La0.5Sr0.5CoO3薄膜 La0.67Ca0.33MnO3薄膜 电阻各向异性 自组织结构 pulsed laser deposition(PLD) La_(0.5)Sr_(0.5)CoO_3 film La_(0.67)Ca_(0.33)MnO_3 film resistance anisotropy self organized structure
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同被引文献5

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