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专题典型微加工刻蚀工艺模拟方法及其分析 被引量：3

Simulation Method and Analysis of Typical Micromachining Etching Processes
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摘要 在概述微机电系统刻蚀工艺模拟研究进展的基础上,讨论了微表面反应模型法、单元自动控制法、基于刻蚀速率数据库的三维各向异性刻蚀模拟等典型的刻蚀工艺模拟的方法,综合分析了这些方法的特点、应用场合和不足,提出了提高刻蚀工艺模拟精度和效率的技术途径。
作者 吴修德 李刚炎
机构地区 长江大学机械工程学院 武汉理工大学机电工程学院
出处 《机械制造》 北大核心 2004年第11期23-26,共4页 Machinery
关键词 刻蚀工艺 微加工 刻蚀速率 各向异性刻蚀 微机电系统 表面反应 模拟方法 数据库 三维 自动控制
分类号 TH-39 [机械工程] TN305 [电子电信—物理电子学]
  • 相关文献

参考文献12

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共引文献10

同被引文献19

  • 1李伟东,张建辉,吴学忠,李圣怡.ICP刻蚀技术在MEMS器件制作中的应用[J].微纳电子技术,2005,42(10):473-476. 被引量：10
  • 2周再发,黄庆安,李伟华,王涓,孙岳明.硅各向异性腐蚀模拟的3-D连续CA模型研究[J].仪器仪表学报,2006,27(6):551-555. 被引量：3
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引证文献3

机械制造
2004年 第11期

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